Nanometer-level axis of rotation metrology for a high-precision macromolecular X-ray diffractometer

The availability of micro-focused beams at 3rd generation synchrotrons makes collecting X-ray data from macromolecular crystals down to a fraction of micron size possible. This requires using goniometers with nanometer-level errors. Crystal positioning is typically realized with a multi-axis goniometer designed to minimize error motion during rotation of the crystal by the data-collection axis. In this paper, five degree-of-freedom error motions of an air bearing diffractometer data-collection axis are evaluated using a multiprobe method. As spindle errors and artifact out-of-roundness approach equal magnitudes, techniques must be used to distinguish and separate each error. A purpose-built fixture orients a single capacitive sensor in three asymmetrical positions to separate artifact form error from spindle error motion. Metrology results of this air bearing Omega spindle demonstrate synchronous errors of 16 nm radial, 4 nm axial and 0.28 μrad tilt.