@inproceedings{e6c6553f98274cbeb1102e0102d6d5c5,
title = "Nanometer-level spindle metrology in a production environment",
abstract = "This paper demonstrates precision spindle metrology in a production environment through the application of two methods of separating residual synchronous spindle face error motion from artifact circular flatness. Face error measurement results obtained using Estler's face error reversal and multiprobe face error separation are demonstrated for an ultra-precision air bearing spindle produced for diamond-turning applications. It is demonstrated that the tilt error motion obtained via radial error measurements agree with tilt error motion obtained via face measurements. Although the theory and application of spindle metrology is widely known, there are problems with inadequate hardware design (when testing at high speed), data acquisition, data analysis, and environmental control. This work documents the implementation of test hardware and analysis software to measure nanometer-level error motions in a production environment.",
author = "Knapp, {Byron R.} and Marsh, {Eric R.} and Arneson, {David A.} and Martin, {Donald L.}",
year = "2009",
month = jan,
day = "1",
language = "English (US)",
series = "Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009",
publisher = "euspen",
pages = "348--351",
editor = "{Van Brussel}, Hendrik and Theresa Burke and H. Spaan and E. Brinksmeier and Theresa Burke and Theresa Burke",
booktitle = "Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009",
note = "9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 ; Conference date: 02-06-2009 Through 05-06-2009",
}