Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding

Keyphrases

• Silicide 100%
• Ion Beam Irradiation 100%
• Silicon Surface 100%
• Nanopatterning 100%
• Metal-coated 100%
• Irradiation 66%
• Grazing-incidence Wide-angle X-ray Scattering (GIWAXS) 66%
• Silicon Substrate 66%
• NiFe 66%
• Silicide Formation 66%
• Nicu 66%
• Ex-situ XPS 66%
• Nanostructures 33%
• Binding Energy 33%
• Metal Atoms 33%
• Time Measurement 33%
• Phase Separation 33%
• Irradiation Process 33%
• Silicide Phase 33%
• Scattering Intensity 33%
• All-metal 33%
• Metal Silicide 33%
• Ion-induced 33%
• Argon Ions 33%
• Metal Impurities 33%
• Metal Coatings 33%
• Nanostructure Formation 33%

Engineering

• Beam Irradiation 100%
• Silicon Surface 100%
• Nanopatterning 100%
• Silicon Substrate 50%
• Nanomaterial 25%
• Binding Energy 25%
• Measurement Time 25%
• Phase Separation 25%
• Metal Atom 25%
• Silicon Metal 25%
• Main Stage 25%
• Nanostructure Formation 25%

Material Science

• Silicon 100%
• Silicide 100%
• Metal Coating 16%