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Nanoskiving: A new method to produce arrays of nanostructures
Qiaobing Xu
,
Robert M. Rioux
, Michael D. Dickey
, George M. Whitesides
Chemical Engineering
Institute of Energy and the Environment (IEE)
Research output
:
Contribution to journal
›
Review article
›
peer-review
141
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Scopus citations
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Keyphrases
Nanostructures
100%
Nanoskiving
100%
Photolithography
27%
Scanning Beam
27%
Top-down Method
27%
Epoxy
18%
Lithography
18%
Polymer Matrix
18%
Curved Surface
18%
Optics
9%
Cost of Capital
9%
Nanotechnology
9%
Fabrication Methods
9%
Plasma Oxidation
9%
Mechanical Strength
9%
Nanostructured Materials
9%
Low-cost Method
9%
Microtome
9%
Metal Structure
9%
Epoxy Matrix
9%
Operating Cost
9%
Sub-micrometer
9%
Nanoscale Structure
9%
Metal Nanostructures
9%
Mechanical Integrity
9%
Array Structure
9%
Metal Deposition
9%
Nanoscience
9%
Soft Lithography
9%
Limited Availability
9%
Cross-sectional Dimension
9%
Cleanroom
9%
Functional Structure
9%
Easily Accessible
9%
Structure Materials
9%
Engineering
Nanomaterial
100%
Optical Lithography
21%
Nanometre
14%
Thin Films
14%
Beam Lithography
14%
Epoxy Matrix
7%
Limitations
7%
Capital Cost
7%
Polymer Matrix
7%
Fabrication Method
7%
Operating Cost
7%
Polymeric Matrix
7%
Sectional Dimension
7%
Clean Rooms
7%
Soft Lithography
7%
Material Science
Nanostructure
100%
Lithography
25%
Thin Films
16%
Polymer Matrix
8%
Nanostructured Material
8%
Strength of Materials
8%