TY - JOUR
T1 - Nanotribology and MEMS
AU - Kim, Seong H.
AU - Asay, David B.
AU - Dugger, Michael T.
N1 - Funding Information:
This work was supported by the National Science Foundation (Grant No. CMMI-0625493) and by Sandia National Laboratories. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy's National Nuclear Security Administration under contract DE-AC04-94AL85000.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2007/10
Y1 - 2007/10
N2 - The tribological phenomena of adhesion, friction, and wear arise when solid objects make contact. As the size of devices shrinks to micro- and nanoscales, the surface-to-volume ratio increases and the effects of body forces (gravity and inertia) become insignificant compared with those of surface forces (van der Waals, capillary, electrostatic, and chemical bonding). In microelectromechanical systems (MEMS), tribological and static interfacial forces are comparable with forces driving device motion. In this situation, macroscale lubrication and wear mitigation methods, such as the use of bulk fluids and micrometer thick coatings, are ineffective; new nano-engineering approaches must be employed for MEMS devices with moving structures. We review fundamental tribological problems related to micro- and nanoscale mechanical contacts and developments in MEMS lubrications.
AB - The tribological phenomena of adhesion, friction, and wear arise when solid objects make contact. As the size of devices shrinks to micro- and nanoscales, the surface-to-volume ratio increases and the effects of body forces (gravity and inertia) become insignificant compared with those of surface forces (van der Waals, capillary, electrostatic, and chemical bonding). In microelectromechanical systems (MEMS), tribological and static interfacial forces are comparable with forces driving device motion. In this situation, macroscale lubrication and wear mitigation methods, such as the use of bulk fluids and micrometer thick coatings, are ineffective; new nano-engineering approaches must be employed for MEMS devices with moving structures. We review fundamental tribological problems related to micro- and nanoscale mechanical contacts and developments in MEMS lubrications.
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U2 - 10.1016/S1748-0132(07)70140-8
DO - 10.1016/S1748-0132(07)70140-8
M3 - Review article
AN - SCOPUS:34748860865
SN - 1748-0132
VL - 2
SP - 22
EP - 29
JO - Nano Today
JF - Nano Today
IS - 5
ER -