Abstract
The neutron depth profiling (NDP) technique has become an increasingly important method to nondestructively measure the absolute concentration versus depth of various elements in substrates. A permanent NDP facility is operational at a tangential beam port of the 1-MW TRIGA Mark II research reactor at The University of Texas at Austin (UT). This facility was developed to perform materials research, specifically measurements of interest to the microelectronics industry. Applications of the UT-NDP facility include measurements of boron-10 profiles in borophosphosilicate glass samples and helium-3 depth profiles of implanted helium-3 in metals, alloys and amorphous materials. A study is underway to determine radiation damage and microstructural changes in stainless steel samples by helium irradiation using NDP and Transmission Electron Microscopy. Another study, currently planned, is to measure surface wear by measuring the depth profiles of implanted beryllium-7 and sodium-22 in various materials.
Original language | English (US) |
---|---|
Pages (from-to) | 273-278 |
Number of pages | 6 |
Journal | Journal of Radioanalytical and Nuclear Chemistry |
Volume | 217 |
Issue number | 2 |
DOIs | |
State | Published - 1997 |
All Science Journal Classification (ASJC) codes
- Analytical Chemistry
- Nuclear Energy and Engineering
- Radiology Nuclear Medicine and imaging
- Pollution
- Spectroscopy
- Public Health, Environmental and Occupational Health
- Health, Toxicology and Mutagenesis