Neutron depth profiling at the University of Texas

Kenan Ünlü, Bernard W. Wehring

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


A Neutron Depth Profiling (NDP) facility has been developed at The University of Texas at Austin (UT) Nuclear Engineering Teaching Laboratory. Thermal neutrons from the tangential beam port of the UT 1-MW TRIGA Mark II research reactor are utilized. The UT-NDP facility consists of a neutron beam collimator, target chamber, beam catcher, and necessary data acquisition and process electronics. The collimator was designed to achieve a high quality thermal neutron beam with good intensity and minimum contamination of neutrons above thermal energies. A target chamber for NDP was constructed from 40.6 cm diameter aluminum tubing. The chamber can accommodate several small samples as well as a single large sample with a diameter up to 30.5 cm. Depth profiles for borophosphosilicate glass films on silicon wafers were measured using the UT-NDP facility. Other potential applications of the UT-NDP facility include the study of implanted boron in semiconductor material; study of nitrogen in metals; and study of helium behavior in metals, and metallic and amorphous alloys.

Original languageEnglish (US)
Pages (from-to)402-405
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, A
Issue number1-3
StatePublished - Dec 30 1994

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation


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