New mechanism for oxidation of native silicon oxide

Engineering & Materials Science

• Silicon oxides 100%
• Oxidation 61%
• Oxides 32%
• Oxygen 31%
• Temperature 18%
• MOS devices 10%
• Oxidants 9%
• Oxide films 9%
• MOSFET devices 8%
• Atoms 7%
• Fabrication 5%
• Defects 5%
• Hot Temperature 3%
• Experiments 2%

Physics & Astronomy

• silicon oxides 72%
• oxidation 50%
• oxides 23%
• oxygen 18%
• metal oxide semiconductors 15%
• miniaturization 8%
• oxygen atoms 7%
• semiconductor devices 7%
• oxide films 6%
• temperature 6%
• penetration 6%
• field effect transistors 6%
• fabrication 4%
• energy 4%
• room temperature 4%
• defects 4%
• interactions 3%
• simulation 2%

Chemical Compounds

• Oxide 37%
• Oxidation Reaction 31%
• Dioxygen 26%
• 100-2 19%
• Atomistic Simulation 17%
• Field Effect 13%
• Liquid Film 13%
• Energy 13%
• Velocity 11%
• Oxygen Atom 11%
• Ambient Reaction Temperature 7%
• Surface 4%