New models for optical MEMS

T. P. Kurzweg, J. A. Martinez, S. P. Levitan, P. J. Marchand, D. M. Chiarulli

Research output: Contribution to journalConference articlepeer-review


Computer Aided Design (CAD) tools for modeling optical MEM systems must not only model three distinct domains (optical, electrical, and mechanical), these tools must also model the interactions between the signals of these domains. We strive to create system-level models that are applicable for an optical MEM CAD tool using techniques that support accurate results and interactive computation times. This paper discusses our modeling efforts for multi-domain optical MEM systems with the implementation of these models into our CAD framework, Chatoyant. As an example of our mixed-modeling research, we present the simulation and analysis of a 2×2 optical cross connect using Chatoyant. The simulations include the dynamic response of a mechanical beam, diffractive optical effects, and the interaction between these domains.

Original languageEnglish (US)
Pages (from-to)63-74
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2001
EventOptomechanical Engineering 2000 - Boston, MA, United States
Duration: Nov 7 2000Nov 8 2000

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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