NITRIDATION OF SILICA SOL-GEL THIN FILMS.

C. G. Pantano; P. M. Glaser; D. J. Armbrust

NITRIDATION OF SILICA SOL-GEL THIN FILMS.

C. G. Pantano, P. M. Glaser, D. J. Armbrust

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The nitridation of silica sol-gel films on silicon is discussed. The films were prepared using an acid-catalyzed solution of silicon alkoxide and water. A gel that is not highly condensed, and that possesses a fine pore microstructure, is produced under these conditions. Thus, the dried gel films used in this study were especially reactive and capable of densification at relatively low temperatures. The densification and refractive index of the films treated in nitrogen and ammonia were examined as a function of temperature.

Original language	English (US)
Title of host publication	Unknown Host Publication Title
Editors	Larry L. Hench, Donald R. Ulrich
Publisher	John Wiley & Sons
Pages	161-177
Number of pages	17
ISBN (Print)	0471896691
State	Published - 1984

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

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title = "NITRIDATION OF SILICA SOL-GEL THIN FILMS.",

abstract = "The nitridation of silica sol-gel films on silicon is discussed. The films were prepared using an acid-catalyzed solution of silicon alkoxide and water. A gel that is not highly condensed, and that possesses a fine pore microstructure, is produced under these conditions. Thus, the dried gel films used in this study were especially reactive and capable of densification at relatively low temperatures. The densification and refractive index of the films treated in nitrogen and ammonia were examined as a function of temperature.",

author = "Pantano, {C. G.} and Glaser, {P. M.} and Armbrust, {D. J.}",

year = "1984",

language = "English (US)",

isbn = "0471896691",

publisher = "John Wiley & Sons",

pages = "161--177",

editor = "Hench, {Larry L.} and Ulrich, {Donald R.}",

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T1 - NITRIDATION OF SILICA SOL-GEL THIN FILMS.

AU - Pantano, C. G.

AU - Glaser, P. M.

AU - Armbrust, D. J.

PY - 1984

Y1 - 1984

N2 - The nitridation of silica sol-gel films on silicon is discussed. The films were prepared using an acid-catalyzed solution of silicon alkoxide and water. A gel that is not highly condensed, and that possesses a fine pore microstructure, is produced under these conditions. Thus, the dried gel films used in this study were especially reactive and capable of densification at relatively low temperatures. The densification and refractive index of the films treated in nitrogen and ammonia were examined as a function of temperature.

AB - The nitridation of silica sol-gel films on silicon is discussed. The films were prepared using an acid-catalyzed solution of silicon alkoxide and water. A gel that is not highly condensed, and that possesses a fine pore microstructure, is produced under these conditions. Thus, the dried gel films used in this study were especially reactive and capable of densification at relatively low temperatures. The densification and refractive index of the films treated in nitrogen and ammonia were examined as a function of temperature.

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UR - http://www.scopus.com/inward/citedby.url?scp=0021551719&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0021551719

SN - 0471896691

SP - 161

EP - 177

BT - Unknown Host Publication Title

A2 - Hench, Larry L.

A2 - Ulrich, Donald R.

PB - John Wiley & Sons

ER -

NITRIDATION OF SILICA SOL-GEL THIN FILMS.

Abstract

All Science Journal Classification (ASJC) codes

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