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Nitrogen-passivated dielectric/InGaAs interfaces with sub-nm equivalent oxide thickness and low interface trap densities

  • Varistha Chobpattana
  • , Junwoo Son
  • , Jeremy J.M. Law
  • , Roman Engel-Herbert
  • , Cheng Ying Huang
  • , Susanne Stemmer

Research output: Contribution to journal › Article › peer-review

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