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Novel piezoelectric polyimide MEMS

  • G. M. Atkinson
  • , R. E. Pearson
  • , Z. Ounaies
  • , C. Park
  • , J. S. Harrison
  • , S. Dogan
  • , J. A. Midkiff

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

30   Link opens in a new tab Scopus citations

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