Nucleation and growth of copper selective-area atomic layer deposition on palladium nanostructures

Keyphrases

• Low Temperature 100%
• Selective-area 100%
• Atomic Layer Deposition 100%
• Palladium 66%
• Nucleon Densities 66%
• Growth Conditions 33%
• Nanostructures 33%
• Overlayer 33%
• High Temperature 33%
• Nucleation Density 33%
• Scanning Electron Microscopy 33%
• Density Increase 33%
• Decreasing Temperature 33%
• Silicon Wafer 33%
• Oxide Surfaces 33%
• Copper Layer 33%
• Electron Beam Lithography 33%
• Grain Structure 33%
• Nanoscale Devices 33%
• Island Growth 33%
• Conformality 33%
• Small Length Scale 33%
• Palladium Layer 33%
• Nucleus Size 33%
• Temperature Window 33%
• Finite nuclei 33%

Material Science

• Nucleation 100%
• Palladium 100%
• Nanostructure 100%
• Density 60%
• Scanning Electron Microscopy 20%
• Lithography 20%
• Silicon Wafer 20%
• Oxide Surface 20%
• Crystal Microstructure 20%