Nucleation-based control of low-temperature diamond film deposition on optical substrates

Donald R. Gilbert; Melanie L. Carasso; Paul A. Demkowicz; Rajiv K. Singh; James H. Adair

doi:10.1557/proc-472-367

Nucleation-based control of low-temperature diamond film deposition on optical substrates

Donald R. Gilbert, Melanie L. Carasso, Paul A. Demkowicz, Rajiv K. Singh, James H. Adair

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at 1.000 Torr in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. SEM and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density.

Original language	English (US)
Pages (from-to)	367-371
Number of pages	5
Journal	Materials Research Society Symposium - Proceedings
Volume	472
DOIs	https://doi.org/10.1557/proc-472-367
State	Published - 1997
Event	Proceedings of the 1997 MRS Spring Symposium - San Francisco, CA, USA Duration: Mar 31 1997 → Apr 3 1997

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Nucleation-based control of low-temperature diamond film deposition on optical substrates",

abstract = "Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at 1.000 Torr in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. SEM and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density.",

author = "Gilbert, {Donald R.} and Carasso, {Melanie L.} and Demkowicz, {Paul A.} and Singh, {Rajiv K.} and Adair, {James H.}",

year = "1997",

doi = "10.1557/proc-472-367",

language = "English (US)",

volume = "472",

pages = "367--371",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

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T1 - Nucleation-based control of low-temperature diamond film deposition on optical substrates

AU - Gilbert, Donald R.

AU - Carasso, Melanie L.

AU - Demkowicz, Paul A.

AU - Singh, Rajiv K.

AU - Adair, James H.

PY - 1997

Y1 - 1997

N2 - Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at 1.000 Torr in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. SEM and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density.

AB - Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at 1.000 Torr in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. SEM and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density.

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U2 - 10.1557/proc-472-367

DO - 10.1557/proc-472-367

M3 - Conference article

AN - SCOPUS:0031357525

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VL - 472

SP - 367

EP - 371

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1997 MRS Spring Symposium

Y2 - 31 March 1997 through 3 April 1997

ER -

Nucleation-based control of low-temperature diamond film deposition on optical substrates

Abstract

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