Observation of deep level centers in 4H and 6H silicon carbide metal oxide semiconductor field effect transistors

Chemical Compounds

• Silicon Carbide 95%
• Field Effect 85%
• Metal Oxide 71%
• Semiconductor 65%
• Electron Spin 35%

Physics & Astronomy

• metal oxide semiconductors 87%
• silicon carbides 82%
• field effect transistors 67%
• electron paramagnetic resonance 38%
• trapping 33%
• performance 18%

Engineering & Materials Science

• MOSFET devices 100%
• Silicon carbide 92%
• Paramagnetic resonance 58%