@inproceedings{37b1f8714fa4467e885ce9dc46b4baca,
title = "Off-plane x-ray reflection grating fabrication",
abstract = "Off-plane X-ray diffraction gratings with precision groove profiles at the submicron scale will be used in next generation X-ray spectrometers. Such gratings will be used on a current NASA suborbital rocket mission, the Off-plane Grating Rocket Experiment (OGRE), and have application for future grating missions. The fabrication of these gratings does not come without challenges. High performance off-plane gratings must be fabricated with precise radial grating patterns, optically at surfaces, and specific facet angles. Such gratings can be made using a series of common micro-fabrication techniques. The resulting process is highly customizable, making it useful for a variety of different mission architectures. In this paper, we detail the fabrication method used to produce high performance off-plane gratings and report the results of a preliminary qualification test of a grating fabricated in this manner. The grating was tested in the off-plane 'Littrow' configuration, for which the grating is most efficient for a given diffraction order, and found to achieve 42% relative efficiency in the blaze order with respect to all diffracted light.",
author = "Peterson, {Thomas J.} and DeRoo, {Casey T.} and Hannah Marlowe and McEntaffer, {Randall L.} and Miles, {Drew M.} and Tutt, {James H.} and Schultz, {Ted B.}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII ; Conference date: 10-08-2015 Through 13-08-2015",
year = "2015",
doi = "10.1117/12.2188302",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Giovanni Pareschi and O'Dell, {Stephen L.} and Giovanni Pareschi and O'Dell, {Stephen L.}",
booktitle = "Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII",
address = "United States",
}