On-chip vacuum microtriode using carbon nanotube field emitters

C. Bower, W. Zhu, D. Shalom, D. Lopez, L. H. Chen, P. L. Gammel, S. Jin

Research output: Contribution to journalArticlepeer-review

119 Scopus citations


We show a fully integrated, on-chip, vacuum microtriode fabricated via silicon micromachining processes using carbon nanotubes as field emitters. The triode is constructed laterally on a silicon surface using microelectromechanical systems (MEMS) design and fabrication principles. The technique incorporates high-performance nanomaterials in a MEMS design with mature solid-state fabrication technology to create miniaturized, on-chip power amplifying vacuum devices, which could have important and far-reaching scientific and technological implications.

Original languageEnglish (US)
Pages (from-to)3820-3822
Number of pages3
JournalApplied Physics Letters
Issue number20
StatePublished - May 20 2002

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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