On-chip vacuum microtriode using carbon nanotube field emitters

Keyphrases

• System Design 100%
• On chip 100%
• Micro-electro-mechanical Systems 100%
• Carbon Nanotubes Field Emitter 100%
• Microtriode 100%
• High Performance 50%
• Nanomaterials 50%
• Carbon Nanotubes 50%
• Silicon Surface 50%
• Fully Integrated 50%
• Integrated chip 50%
• Fabrication Technology 50%
• Field Emitter 50%
• Triode 50%
• Silicon Micromachining Process 50%
• Technological Implications 50%
• Solid-state Assemblies 50%
• Vacuum Electron Device 50%

Engineering

• Carbon Nanotube 100%
• Microelectromechanical System Design 100%
• Nanomaterial 50%
• Silicon Surface 50%
• Micro Machining 50%
• Microelectromechanical System Fabrication 50%