On Stochastic Reduction in Laser-Assisted Dielectric Breakdown for Programmable Nanopore Fabrication

Zifan Tang, Ming Dong, Xiaodong He, Weihua Guan

Research output: Contribution to journalArticlepeer-review

6 Scopus citations


The controlled dielectric breakdown emerged as a promising alternative toward accessible solid-state nanopore fabrication. Several prior studies have shown that laser-assisted dielectric breakdown could help control the nanopore position and reduce the possibility of forming multiple pores. Here, we developed a physical model to estimate the probability of forming a single nanopore under different combinations of the laser power and the electric field. This model relies on the material- and experiment-specific parameters: the Weibull statistical parameters and the laser-induced photothermal etching rate. Both the model and our experimental data suggest that a combination of a high laser power and a low electric field is statistically favorable for forming a single nanopore at a programmed location. While this model relies on experiment-specific parameters, we anticipate it could provide the experimental insights for nanopore fabrication by the laser-assisted dielectric breakdown method, enabling broader access to solid-state nanopores and their sensing applications.

Original languageEnglish (US)
Pages (from-to)13383-13391
Number of pages9
JournalACS Applied Materials and Interfaces
Issue number11
StatePublished - Mar 24 2021

All Science Journal Classification (ASJC) codes

  • General Materials Science


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