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On The Absolute Sensitivity of Near-Zero Field Magnetoresistance for Device Reliability Studies

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on the absolute sensitivity of a new semiconductor device reliability technique, near-zero field magnetoresistance. There has been fairly substantial effort in developing this tool for the analysis of defect structures, but the absolute sensitivity of the technique has yet to been explored. The primary goal of this study is to find an absolute sensitivity value, as well as to determine the spectrometer parameters for achieving this maximum sensitivity. Using the dc I-V biasing scheme on Si/SiO2 MOSFET arrays, we show that this technique is more sensitive and easier to perform than its sister technique, electrically detected magnetic resonance. We find that the absolute sensitivity is fewer than 1,000 defects, and we hypothesize that future efforts could allow for the technique to achieve sensitivity to fewer than 100 defects.

Original languageEnglish (US)
Title of host publication2023 IEEE International Integrated Reliability Workshop, IIRW 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350327274
DOIs
StatePublished - 2023
Event2023 IEEE International Integrated Reliability Workshop, IIRW 2023 - South Lake Tahoe, United States
Duration: Oct 8 2023Oct 12 2023

Publication series

NameIEEE International Integrated Reliability Workshop Final Report
ISSN (Print)1930-8841
ISSN (Electronic)2374-8036

Conference

Conference2023 IEEE International Integrated Reliability Workshop, IIRW 2023
Country/TerritoryUnited States
CitySouth Lake Tahoe
Period10/8/2310/12/23

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials

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