On the capacitance of metal/high-k dielectric material stack/silicon structures

Keyphrases

• Capacitance 100%
• Silicon Structure 100%
• High-k Dielectric 100%
• Metal-insulator 100%
• Temperature Measurement 50%
• Si Substrate 50%
• High-permittivity 50%
• Capacitance-voltage Measurements 50%
• Gate Dielectric 50%
• Strong Dependence 50%
• Interfacial Layer 50%
• Measurement Frequency 50%
• Accumulation Capacitance 50%
• SrTa2O6 50%
• High-k Gate Dielectrics 50%

Material Science

• Silicon 100%
• Dielectric Material 100%
• Capacitance 100%
• Permittivity 25%
• Capacitor 25%