On the rate and uniformity of CdTe deposition in an impinging jet reactor: experimental results

D. W. Snyder; P. J. Sides; E. I. Ko

doi:10.1016/0022-0248(92)90020-J

On the rate and uniformity of CdTe deposition in an impinging jet reactor: experimental results

D. W. Snyder, P. J. Sides, E. I. Ko

Applied Research Laboratory (ARL)

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Cadmium telluride was deposited by the pyrolysis of organometallic precursors in an impinging jet reactor. The deposition was nonuniform when mass transfer limitations were significant. The deposition rate decreased when hydrogen pressure was decreased from 720 to 100 Torr; experiments with inert gases demonstrated the dependence of the reaction rate on the presence of hydrogen. Minima appeared in the deposit profile at low nozzle heights and high flow velocities. Enhanced sublimation of CdTe and slight cooling of the substrate might be responsible for this phenomenon.

Original language	English (US)
Pages (from-to)	163-173
Number of pages	11
Journal	Journal of Crystal Growth
Volume	123
Issue number	1-2
DOIs	https://doi.org/10.1016/0022-0248(92)90020-J
State	Published - Sep 1992

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

Access to Document

10.1016/0022-0248(92)90020-J

Cite this

@article{af8df0d295b6468d930edda72e78cf26,

title = "On the rate and uniformity of CdTe deposition in an impinging jet reactor: experimental results",

abstract = "Cadmium telluride was deposited by the pyrolysis of organometallic precursors in an impinging jet reactor. The deposition was nonuniform when mass transfer limitations were significant. The deposition rate decreased when hydrogen pressure was decreased from 720 to 100 Torr; experiments with inert gases demonstrated the dependence of the reaction rate on the presence of hydrogen. Minima appeared in the deposit profile at low nozzle heights and high flow velocities. Enhanced sublimation of CdTe and slight cooling of the substrate might be responsible for this phenomenon.",

author = "Snyder, {D. W.} and Sides, {P. J.} and Ko, {E. I.}",

note = "Funding Information: The writers acknowledge the support of the National Science Foundation (CTS-8908547), lI-VI, Inc., the Western Pennsylvania Advanced Technology Center, and the Rockwell Foundation.",

year = "1992",

month = sep,

doi = "10.1016/0022-0248(92)90020-J",

language = "English (US)",

volume = "123",

pages = "163--173",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier",

number = "1-2",

}

TY - JOUR

T1 - On the rate and uniformity of CdTe deposition in an impinging jet reactor

T2 - experimental results

AU - Snyder, D. W.

AU - Sides, P. J.

AU - Ko, E. I.

N1 - Funding Information: The writers acknowledge the support of the National Science Foundation (CTS-8908547), lI-VI, Inc., the Western Pennsylvania Advanced Technology Center, and the Rockwell Foundation.

PY - 1992/9

Y1 - 1992/9

N2 - Cadmium telluride was deposited by the pyrolysis of organometallic precursors in an impinging jet reactor. The deposition was nonuniform when mass transfer limitations were significant. The deposition rate decreased when hydrogen pressure was decreased from 720 to 100 Torr; experiments with inert gases demonstrated the dependence of the reaction rate on the presence of hydrogen. Minima appeared in the deposit profile at low nozzle heights and high flow velocities. Enhanced sublimation of CdTe and slight cooling of the substrate might be responsible for this phenomenon.

AB - Cadmium telluride was deposited by the pyrolysis of organometallic precursors in an impinging jet reactor. The deposition was nonuniform when mass transfer limitations were significant. The deposition rate decreased when hydrogen pressure was decreased from 720 to 100 Torr; experiments with inert gases demonstrated the dependence of the reaction rate on the presence of hydrogen. Minima appeared in the deposit profile at low nozzle heights and high flow velocities. Enhanced sublimation of CdTe and slight cooling of the substrate might be responsible for this phenomenon.

UR - http://www.scopus.com/inward/record.url?scp=0026927352&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0026927352&partnerID=8YFLogxK

U2 - 10.1016/0022-0248(92)90020-J

DO - 10.1016/0022-0248(92)90020-J

M3 - Article

AN - SCOPUS:0026927352

SN - 0022-0248

VL - 123

SP - 163

EP - 173

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-2

ER -

On the rate and uniformity of CdTe deposition in an impinging jet reactor: experimental results

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this