On Universality in sputtering yields due to cluster bombardment

Robert J. Paruch, Barbara J. Garrison, Maksymilian Mlynek, Zbigniew Postawa

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16 Scopus citations


Molecular dynamics simulations, in which atomic and molecular solids are bombarded by Arn(n = 60-2953) clusters, are used to explain the physics that underlie the "universal relation" of the sputtering yield Y per cluster atom versus incident energy E per cluster atom (Y/n vs E/n). We show that a better representation to unify the results is Y/(E/U0) versus (E/U0)/n, where U0is the sample cohesive energy per atom or molecular equivalent, and the yield Y is given in the units of atoms or molecular equivalents for atomistic and molecular solids, respectively. In addition, we identified a synergistic cluster effect. Specifically, for a given (E/U0)/n value, larger clusters produce larger yields than the yields that are only proportional to the cluster size n or equivalently to the scaled energy E/U0. This synergistic effect can be described in the high (E/U0)/n regime as scaling of Y with (E/U0)?, where ? > 1.

Original languageEnglish (US)
Pages (from-to)3227-3230
Number of pages4
JournalJournal of Physical Chemistry Letters
Issue number18
StatePublished - Sep 18 2014

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physical and Theoretical Chemistry


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