TY - JOUR
T1 - Optical fibers with patterned ZnO/electrode coatings for flexural actuators
AU - Trolier-Mckinstry, S.
AU - Fox, G. R.
AU - Kholkin, A.
AU - Muller, C. A.P.
AU - Setter, N.
N1 - Funding Information:
The assistance of Markus Kohli is gratefully acknowledged. Helpful discussions with Genaro Zavala are also appreciated. This work was partially funded through a DARPA contract DABT63-95-C-0053 and an NSF award DMR 9502431. This work was also supported by the Optical Sciences, Applications, and Technology Priority Program of the Board of the Swiss Federal Institute of Technology.
PY - 1999/3/30
Y1 - 1999/3/30
N2 - A fiber-based flexural actuator was developed using a patterned piezoelectric ZnO/electrode fiber coating on a standard telecommunications optical fiber. The actuator was composed of a concentric inner Cr/Au electrode, a thick sputtered ZnO coating, and an outer Cr/Au electrode. Using standard photolithography, 30-μm wide gaps in one of the electrodes were patterned along 2-cm lengths parallel with the fiber axis. This device can be driven in a bimorph mode. It was demonstrated that a split electrode actuator could be excited into electromechanical resonance to produce useful displacements at the end of the fiber. Such flexural fiber actuators could be used in scanning near field optical microscopes for fiber tip height adjustment. In addition, the actuator design can be extended to manufacture two-axis integrated fiber alignment devices.
AB - A fiber-based flexural actuator was developed using a patterned piezoelectric ZnO/electrode fiber coating on a standard telecommunications optical fiber. The actuator was composed of a concentric inner Cr/Au electrode, a thick sputtered ZnO coating, and an outer Cr/Au electrode. Using standard photolithography, 30-μm wide gaps in one of the electrodes were patterned along 2-cm lengths parallel with the fiber axis. This device can be driven in a bimorph mode. It was demonstrated that a split electrode actuator could be excited into electromechanical resonance to produce useful displacements at the end of the fiber. Such flexural fiber actuators could be used in scanning near field optical microscopes for fiber tip height adjustment. In addition, the actuator design can be extended to manufacture two-axis integrated fiber alignment devices.
UR - http://www.scopus.com/inward/record.url?scp=0032638767&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0032638767&partnerID=8YFLogxK
U2 - 10.1016/S0924-4247(98)00273-8
DO - 10.1016/S0924-4247(98)00273-8
M3 - Article
AN - SCOPUS:0032638767
SN - 0924-4247
VL - 73
SP - 267
EP - 274
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 3
ER -