TY - JOUR
T1 - Optical fibers with patterned ZnO/electrode coatings for flexural actuators
AU - Trolier-McKinstry, S.
AU - Fox, G. R.
AU - Kholkin, A.
AU - Muller, C. A.P.
AU - Setter, N.
N1 - Funding Information:
The assistance of Markus Kohli is gratefully acknowledged. Helpful discussions with Genaro Zavala are also appreciated. This work was partially funded through a DARPA contract DABT63-95-C-0053 and an NSF award DMR 9502431. This work was also supported by the Optical Sciences, Applications, and Technology Priority Program of the Board of the Swiss Federal Institute of Technology.
PY - 1997
Y1 - 1997
N2 - Piezoelectric ZnO coatings were used in this work to develop a flexural actuator for an optical fiber. The basic device geometry was as follows: inner Cr/Au electrodes were evaporated onto a cleaned optical fiber; a thick ZnO coating was then grown by sputtering; finally a set of 2 mm ring top electrodes were deposited through a shadow mask. Flexural actuators were made by photolithographically patterning either the inner or outer Cr/Au drive electrodes so that it was split down the length of the fiber. This enables each half of the fiber to be actuated independently. The result is that the optical fiber is forced to flex. A processing scheme by which 30 μm gaps could be patterned into the electrodes was developed using standard clean room techniques. Such flexural actuators are attractive for scanning near field optical microscopes and in fiber alignment devices.
AB - Piezoelectric ZnO coatings were used in this work to develop a flexural actuator for an optical fiber. The basic device geometry was as follows: inner Cr/Au electrodes were evaporated onto a cleaned optical fiber; a thick ZnO coating was then grown by sputtering; finally a set of 2 mm ring top electrodes were deposited through a shadow mask. Flexural actuators were made by photolithographically patterning either the inner or outer Cr/Au drive electrodes so that it was split down the length of the fiber. This enables each half of the fiber to be actuated independently. The result is that the optical fiber is forced to flex. A processing scheme by which 30 μm gaps could be patterned into the electrodes was developed using standard clean room techniques. Such flexural actuators are attractive for scanning near field optical microscopes and in fiber alignment devices.
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M3 - Conference article
AN - SCOPUS:0030647992
SN - 0272-9172
VL - 459
SP - 189
EP - 194
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Proceedings of the 1996 MRS Fall Symposium
Y2 - 2 December 1996 through 5 December 1996
ER -