Optical spectroscopic study of inverted cylindrical magnetron sputtering of YBa2Cu3O7-x

X. X. Xi; X. D. Wu; A. Inam; Q. Li; D. Hemmick; A. Findikoglu; T. Venkatesan; C. C. Chang; R. Howard

doi:10.1063/1.104210

Optical spectroscopic study of inverted cylindrical magnetron sputtering of YBa₂Cu₃O_7-x

X. X. Xi, X. D. Wu, A. Inam, Q. Li, D. Hemmick, A. Findikoglu, T. Venkatesan, C. C. Chang, R. Howard

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

Optical spectroscopic studies of the plasma generated by inverted cylindrical magnetron sputtering of the high-temperature superconductor YBa ₂Cu₃O_7-x reveal strong ionic emissions from cation elements as well as from the sputter gases. The emissions of cationic ions are weakened drastically when O₂ is added into the sputter gas indicating the dominating role of ions in the reaction with oxygen to form gas phase oxides. The formation of gas phase oxides is proposed to be an important precursor step for the in situ deposition of YBa₂Cu₃O _7-x thin films.

Original language	English (US)
Pages (from-to)	96-98
Number of pages	3
Journal	Applied Physics Letters
Volume	57
Issue number	1
DOIs	https://doi.org/10.1063/1.104210
State	Published - 1990

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.104210

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title = "Optical spectroscopic study of inverted cylindrical magnetron sputtering of YBa2Cu3O7-x",

abstract = "Optical spectroscopic studies of the plasma generated by inverted cylindrical magnetron sputtering of the high-temperature superconductor YBa 2Cu3O7-x reveal strong ionic emissions from cation elements as well as from the sputter gases. The emissions of cationic ions are weakened drastically when O2 is added into the sputter gas indicating the dominating role of ions in the reaction with oxygen to form gas phase oxides. The formation of gas phase oxides is proposed to be an important precursor step for the in situ deposition of YBa2Cu3O 7-x thin films.",

author = "Xi, {X. X.} and Wu, {X. D.} and A. Inam and Q. Li and D. Hemmick and A. Findikoglu and T. Venkatesan and Chang, {C. C.} and R. Howard",

year = "1990",

doi = "10.1063/1.104210",

language = "English (US)",

volume = "57",

pages = "96--98",

journal = "Applied Physics Letters",

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T1 - Optical spectroscopic study of inverted cylindrical magnetron sputtering of YBa2Cu3O7-x

AU - Xi, X. X.

AU - Wu, X. D.

AU - Inam, A.

AU - Li, Q.

AU - Hemmick, D.

AU - Findikoglu, A.

AU - Venkatesan, T.

AU - Chang, C. C.

AU - Howard, R.

PY - 1990

Y1 - 1990

N2 - Optical spectroscopic studies of the plasma generated by inverted cylindrical magnetron sputtering of the high-temperature superconductor YBa 2Cu3O7-x reveal strong ionic emissions from cation elements as well as from the sputter gases. The emissions of cationic ions are weakened drastically when O2 is added into the sputter gas indicating the dominating role of ions in the reaction with oxygen to form gas phase oxides. The formation of gas phase oxides is proposed to be an important precursor step for the in situ deposition of YBa2Cu3O 7-x thin films.

AB - Optical spectroscopic studies of the plasma generated by inverted cylindrical magnetron sputtering of the high-temperature superconductor YBa 2Cu3O7-x reveal strong ionic emissions from cation elements as well as from the sputter gases. The emissions of cationic ions are weakened drastically when O2 is added into the sputter gas indicating the dominating role of ions in the reaction with oxygen to form gas phase oxides. The formation of gas phase oxides is proposed to be an important precursor step for the in situ deposition of YBa2Cu3O 7-x thin films.

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 1

ER -

Optical spectroscopic study of inverted cylindrical magnetron sputtering of YBa₂Cu₃O_7-x

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