Optimal operation of thin film growth with multiscale process objectives

Amit Varshney, Antonios Armaou

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The issue of optimal time-varying operation for transport-reaction processes is considered, when the cost functional and/or equality constraints necessitate the consideration of phenomena that occur over disparate length scales. Multiscale process models are initially developed, linking continuum conservation laws with microscopic scale simulators. Subsequently, order reduction techniques for dissipative partial-differential equations are combined with adaptive tabulation methods for microscopic simulators to reduce the computational requirements of the optimization problem, which is then solved using standard search algorithms. The method is demonstrated on a thin film deposition process, where optimal surface temperature profiles and inlet switching times that simultaneously maximize thickness uniformity and minimize surface roughness across the film surface are computed.

Original languageEnglish (US)
Title of host publicationProceedings of the 16th IFAC World Congress, IFAC 2005
PublisherIFAC Secretariat
Number of pages6
ISBN (Print)008045108X, 9780080451084
StatePublished - 2005

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
ISSN (Print)1474-6670

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering


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