Optimizing x-ray optics for modulating x-ray beams with MEMS devices

Donald A. Walko, Pice Chen, Daniel Lopez, Jin Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


We have used microelectromechanical systems (MEMS) to dynamically modulate synchrotron x-ray beams. By oscillating a small silicon crystal at 10s to 100s of kHz, we have demonstrated that the "time window" in which the Bragg condition is satisfied, and thus the time in which an x-ray pulse can be deflected by diffraction, can be significantly less than 1 ns. Here we discuss the optimization of x-ray optics to further improve device performance. We show that the time window can be reduced by matching the dispersion of a monochromator crystal to that of the MEMS crystal. We consider the case of an ideally perfect crystal and also treat the effects of strain and curvature, either of which broadens the crystal rocking curve and thus degrades the time window. A careful understanding of the effects of dispersion and x-ray wavelength produces time windows approaching the typical synchrotron pulse duration.

Original languageEnglish (US)
Title of host publicationAdvances in X-Ray/EUV Optics and Components XIV
EditorsAli M. Khounsary, Shunji Goto, Christian Morawe
ISBN (Electronic)9781510629097
StatePublished - 2019
EventAdvances in X-Ray/EUV Optics and Components XIV 2019 - San Diego, United States
Duration: Aug 14 2019Aug 15 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceAdvances in X-Ray/EUV Optics and Components XIV 2019
Country/TerritoryUnited States
CitySan Diego

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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