Oxidation of c-axis-oriented epitaxial YBa2Cu3O7-δ thin films in ozone-containing atmospheres

B. J. Gibbons, C. B. Eom, R. A. Rao, S. Trolier-McKinstry, D. G. Schlom

Research output: Contribution to journalArticlepeer-review


Oxygen diffusion into c-axis-oriented YBa2Cu3O7-δ epitaxial thin films was observed using real-time spectroscopic ellipsometry. The experiments were conducted under controlled atmospheres of 10% O3/90% O2 and 80% O3/20% O2. At 2 × 10-5 torr, oxidation of the films began at temperatures as low as 100-125 °C for heating rates ≤3 °C/min. Full oxidation was seen by 190 °C at these rates. Based on these data, the activation energy of oxygen diffusion into YBa2Cu3O7-δ from an ozone/oxygen atmosphere was found to be between 0.43 and 0.52 eV. This was appreciably smaller than for in-diffusion in a molecular oxygen atmosphere. Higher ozone content atmospheres did not improve the oxidation kinetics. These atmospheres did, however, delay the onset of reduction in the films by 60-70 °C at higher temperatures.

Original languageEnglish (US)
Pages (from-to)884-889
Number of pages6
JournalJournal of Materials Research
Issue number4
StatePublished - Apr 2002

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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