@inproceedings{0c3e0fb3d1cf406dad830823592192f5,
title = "Oxide degradation resulting from photoresist ashing",
author = "Mikulan, {P. J.} and Koo, {T. T.} and Awadelkarim, {O. O.} and Fonash, {S. J.}",
year = "1993",
doi = "10.1557/proc-309-61",
language = "English (US)",
isbn = "1558992057",
series = "Materials Research Society Symposium Proceedings",
publisher = "Publ by Materials Research Society",
pages = "61--66",
booktitle = "Materials Research Society Symposium Proceedings",
note = "Proceedings of the Symposium on Materials Reliability in Microelectronics III ; Conference date: 12-04-1993 Through 15-04-1993",
}