@inproceedings{0c3e0fb3d1cf406dad830823592192f5,
title = "Oxide degradation resulting from photoresist ashing",
author = "Mikulan, \{P. J.\} and Koo, \{T. T.\} and Awadelkarim, \{O. O.\} and Fonash, \{S. J.\}",
year = "1993",
doi = "10.1557/proc-309-61",
language = "English (US)",
isbn = "1558992057",
series = "Materials Research Society Symposium Proceedings",
publisher = "Publ by Materials Research Society",
pages = "61--66",
booktitle = "Materials Research Society Symposium Proceedings",
note = "Proceedings of the Symposium on Materials Reliability in Microelectronics III ; Conference date: 12-04-1993 Through 15-04-1993",
}