Oxygen pressure as a parameter in the D.C. plasma anodization of silicon

R. B. Beck, M. Patyra, J. Ruzyłło, A. Jakubowski

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Fingerprint

Dive into the research topics of 'Oxygen pressure as a parameter in the D.C. plasma anodization of silicon'. Together they form a unique fingerprint.

Engineering

Keyphrases

Material Science