Particle coating in seeded dusty plasma reactor: Distribution of deposition rates

Jin Cao; Themis Matsoukas

doi:10.1116/1.1603283

Particle coating in seeded dusty plasma reactor: Distribution of deposition rates

Jin Cao, Themis Matsoukas

Chemical Engineering

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Original language	English (US)
Pages (from-to)	2011-2017
Number of pages	7
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	5
DOIs	https://doi.org/10.1116/1.1603283
State	Published - 2003

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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Particle coating in seeded dusty plasma reactor: Distribution of deposition rates

All Science Journal Classification (ASJC) codes

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