Mathematics
Optics
97%
Damage
89%
Mirror
84%
Extreme Ultraviolet
78%
Extremes
68%
Plasma
20%
Optical Lithography
19%
In Situ Measurements
18%
Atomic Force Microscope
17%
Life Expectancy
14%
Irradiation
13%
Energy
12%
Spectroscopy
12%
Contamination
11%
Radiation
10%
Scattering
8%
Decrease
8%
Experiment
7%
Imply
6%
Performance
5%
Physics & Astronomy
accumulators
74%
optics
54%
damage
54%
mirrors
54%
reflectance
46%
debris
20%
ultraviolet radiation
18%
ion scattering
11%
in situ measurement
10%
energetic particles
10%
bombardment
8%
contamination
8%
lithography
7%
fluence
7%
microscopes
7%
vapors
7%
irradiation
6%
thresholds
5%
energy
5%
radiation
5%
spectroscopy
4%
performance
4%
Engineering & Materials Science
Optics
78%
Mirrors
77%
Surface structure
26%
Debris
23%
Hot Temperature
20%
Plasmas
19%
Facings
14%
Photolithography
13%
Spectroscopy
12%
Irradiation
11%
Contamination
10%
Microscopes
10%
Scattering
10%
Ions
9%
Vapors
9%
Radiation
8%
Experiments
3%
Chemical Compounds
Reflectivity
87%
Drop
28%
Surface
20%
Ion Scattering Spectroscopy
16%
Surface Composition
11%
Surface Structure
10%
Force
7%
Energy
5%
Amount
4%