TY - GEN
T1 - Parylene background fluorescence study for biomems applications
AU - Lu, Bo
AU - Zheng, Siyang
AU - Tai, Yu Chong
PY - 2009/12/11
Y1 - 2009/12/11
N2 - Parylene is a commonly used material in Bio-MEMS field. Background fluorescence of parylene film itself can be a major obstacle for parylene-based devices used in fluorescent detection. We report here an in-depth study of the fluorescence mechanisms of parylene-C and parylene-HT films with fluorescent microscopy, fluorimeter, and infrared spectroscopy. Influences of fabrication process on background fluorescence of the devices are discussed. Solutions to reduce background fluorescence are provided and effectiveness is confirmed. Parylene-HT is found to be a more promising candidate for Bio-MEMS applications for fluorescence concern. The methods and results are valuable to other polymer materials in MEMS field.
AB - Parylene is a commonly used material in Bio-MEMS field. Background fluorescence of parylene film itself can be a major obstacle for parylene-based devices used in fluorescent detection. We report here an in-depth study of the fluorescence mechanisms of parylene-C and parylene-HT films with fluorescent microscopy, fluorimeter, and infrared spectroscopy. Influences of fabrication process on background fluorescence of the devices are discussed. Solutions to reduce background fluorescence are provided and effectiveness is confirmed. Parylene-HT is found to be a more promising candidate for Bio-MEMS applications for fluorescence concern. The methods and results are valuable to other polymer materials in MEMS field.
UR - http://www.scopus.com/inward/record.url?scp=71449122385&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=71449122385&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2009.5285534
DO - 10.1109/SENSOR.2009.5285534
M3 - Conference contribution
AN - SCOPUS:71449122385
SN - 9781424441938
T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 176
EP - 179
BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Y2 - 21 June 2009 through 25 June 2009
ER -