Parylene background fluorescence study for biomems applications

Bo Lu; Siyang Zheng; Yu Chong Tai

doi:10.1109/SENSOR.2009.5285534

Parylene background fluorescence study for biomems applications

Bo Lu, Siyang Zheng, Yu Chong Tai

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

Parylene is a commonly used material in Bio-MEMS field. Background fluorescence of parylene film itself can be a major obstacle for parylene-based devices used in fluorescent detection. We report here an in-depth study of the fluorescence mechanisms of parylene-C and parylene-HT films with fluorescent microscopy, fluorimeter, and infrared spectroscopy. Influences of fabrication process on background fluorescence of the devices are discussed. Solutions to reduce background fluorescence are provided and effectiveness is confirmed. Parylene-HT is found to be a more promising candidate for Bio-MEMS applications for fluorescence concern. The methods and results are valuable to other polymer materials in MEMS field.

Original language	English (US)
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	176-179
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2009.5285534
State	Published - Dec 11 2009
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: Jun 21 2009 → Jun 25 2009

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	United States
City	Denver, CO
Period	6/21/09 → 6/25/09

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

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10.1109/SENSOR.2009.5285534

Cite this

Lu, B., Zheng, S., & Tai, Y. C. (2009). Parylene background fluorescence study for biomems applications. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 176-179). Article 5285534 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285534

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title = "Parylene background fluorescence study for biomems applications",

abstract = "Parylene is a commonly used material in Bio-MEMS field. Background fluorescence of parylene film itself can be a major obstacle for parylene-based devices used in fluorescent detection. We report here an in-depth study of the fluorescence mechanisms of parylene-C and parylene-HT films with fluorescent microscopy, fluorimeter, and infrared spectroscopy. Influences of fabrication process on background fluorescence of the devices are discussed. Solutions to reduce background fluorescence are provided and effectiveness is confirmed. Parylene-HT is found to be a more promising candidate for Bio-MEMS applications for fluorescence concern. The methods and results are valuable to other polymer materials in MEMS field.",

author = "Bo Lu and Siyang Zheng and Tai, {Yu Chong}",

year = "2009",

month = dec,

day = "11",

doi = "10.1109/SENSOR.2009.5285534",

language = "English (US)",

isbn = "9781424441938",

series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "176--179",

booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",

}

Lu, B, Zheng, S & Tai, YC 2009, Parylene background fluorescence study for biomems applications. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285534, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 176-179, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 6/21/09. https://doi.org/10.1109/SENSOR.2009.5285534

Parylene background fluorescence study for biomems applications. / Lu, Bo; Zheng, Siyang; Tai, Yu Chong.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 176-179 5285534 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Parylene background fluorescence study for biomems applications

AU - Lu, Bo

AU - Zheng, Siyang

AU - Tai, Yu Chong

PY - 2009/12/11

Y1 - 2009/12/11

N2 - Parylene is a commonly used material in Bio-MEMS field. Background fluorescence of parylene film itself can be a major obstacle for parylene-based devices used in fluorescent detection. We report here an in-depth study of the fluorescence mechanisms of parylene-C and parylene-HT films with fluorescent microscopy, fluorimeter, and infrared spectroscopy. Influences of fabrication process on background fluorescence of the devices are discussed. Solutions to reduce background fluorescence are provided and effectiveness is confirmed. Parylene-HT is found to be a more promising candidate for Bio-MEMS applications for fluorescence concern. The methods and results are valuable to other polymer materials in MEMS field.

AB - Parylene is a commonly used material in Bio-MEMS field. Background fluorescence of parylene film itself can be a major obstacle for parylene-based devices used in fluorescent detection. We report here an in-depth study of the fluorescence mechanisms of parylene-C and parylene-HT films with fluorescent microscopy, fluorimeter, and infrared spectroscopy. Influences of fabrication process on background fluorescence of the devices are discussed. Solutions to reduce background fluorescence are provided and effectiveness is confirmed. Parylene-HT is found to be a more promising candidate for Bio-MEMS applications for fluorescence concern. The methods and results are valuable to other polymer materials in MEMS field.

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DO - 10.1109/SENSOR.2009.5285534

M3 - Conference contribution

AN - SCOPUS:71449122385

SN - 9781424441938

T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 176

EP - 179

BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 21 June 2009 through 25 June 2009

ER -

Parylene background fluorescence study for biomems applications

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