Passivation of high energy hydrogen ion implantation damage in silicon with low energy atomic hydrogen

K. Srikanth, J. Shenal, S. Ashok

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Passivation of high energy hydrogen ion implantation damage in silicon with low energy atomic hydrogen'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science