Abstract
GaAs microbridge thermocouples with lengths ranging from 40 to 650 μm and operating at room temperature have been fabricated for the detection of infrared radiation. A CO 2 laser of a 10.6-μm wavelength was used to characterize the performance of the detectors in air and in vacuum. A responsivity of 4.2 V/W with a corresponding detectivity D* = 8 × 10 6 cm Hz 1/2/W and a time constant of 2.2 ms have been measured in vacuum for 650-μm-long bridges, and a shorter time constant of 50 μs was obtained for 40-μm-long bridges. An analytic thermal transport model has been used to simulate the operation of the sensors. The heat-transfer coefficient has been evaluated by comparing the data from air and vacuum measurements. The spectral response and the absorbance of the microbridge have also been presented.
Original language | English (US) |
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Pages (from-to) | 136-141 |
Number of pages | 6 |
Journal | Journal of Microelectromechanical Systems |
Volume | 6 |
Issue number | 2 |
DOIs | |
State | Published - Jun 1997 |
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering