Performance of micromachined quartz gravimetric sensors upon electrochemical adsorption of monolayers

Ping Kao, Ashish Patwardhan, David Allara, Srinivas Tadigadapa, Jörg Strutwolf, Damien Arrigan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


This paper presents the results of electrochemical calibration experiments performed on micromachined quartz gravimetric sensors. The absolute mass sensitivity of bulk acoustic quartz crystal microbalance (QCM) can be improved into the sub-10-12 g range upon miniaturization of the resonator thickness and area. Using plasma etching, we have fabricated miniaturized QCMs with thicknesses of ∼29 μ̂m and diameters of 500 μ̂m with f0=58 MHz. Resonators with 60 nm thick Ti/Pt top electrodes were used to study the electrochemically induced oxide layer formation on the metal surface, the adsorption of hydrogen, and underpotential deposition (UPD) of Cu on Pt electrodes. The performance of microQCM is compared with the performance of a frequency matched overtone mode of a commercial 5 MHz resonator. Micromachined QCMs showed expected sensitivity improvement to UPD of Cu, however an unexpected hundred fold enhancement to oxygen and ∼28 times enhancement in the sensitivity to hydrogen adsorption was observed which may be due to the roughness/porosity of the electrodes.

Original languageEnglish (US)
Title of host publication2008 IEEE Sensors, SENSORS 2008
Number of pages4
StatePublished - 2008
Event2008 IEEE Sensors, SENSORS 2008 - Lecce, Italy
Duration: Oct 26 2008Oct 29 2008

Publication series

NameProceedings of IEEE Sensors


Other2008 IEEE Sensors, SENSORS 2008

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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