PERIOD TRIPLING STATES AND NON-MONOTONIC ENERGY DISSIPATION IN COUPLED MEMS RESONATORS

Mingkang Wang, Diego J. Perez-Morelo, Daniel Lopez, Vladimir A. Aksyuk

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

When two eigenmodes are at internal resonance, i.e. they have commensurate eigenfrequencies, their coupling strength can be significantly enhanced. Rich nonlinear dynamics have been shown at internal resonance. In this work, we present a novel non-monotonic energy dissipation rate of microelectromechanical systems (MEMs) at internal resonance. We demonstrate that the MEMS can selectively dissipate via two largely distinctive pathways, solely depending on the choice of their relative initial phase. Remarkably, these novel and complicated behaviors can be understood by an intuitive parametric-oscillator-like model. Our work illuminates a path to dissipation engineering, frequency stabilization, and sensitivity enhancement.

Original languageEnglish (US)
Title of host publication2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022
EditorsReza Ghodssi, Jenna F. Chan
PublisherTransducer Research Foundation
Pages35-38
Number of pages4
ISBN (Electronic)9781940470047
StatePublished - 2022
Event2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022 - Hilton Head, United States
Duration: Jun 5 2022Jun 9 2022

Publication series

Name2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022

Conference

Conference2022 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2022
Country/TerritoryUnited States
CityHilton Head
Period6/5/226/9/22

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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