TY - JOUR
T1 - Phase equilibria in transition metal Al-Ga-N systems and thermal stability of contacts to AlGaN
AU - Schweitz, K. O.
AU - Mohney, S. E.
N1 - Funding Information:
The authors are grateful to DARPA (E. Martinez) for grant FQ8671-9900881 administered through AFOSR (G. Witt) and to BMDO for grant F33615-00-C-5421 administered through AFRL (W. Lampert) for the support of this work.
PY - 2001/3
Y1 - 2001/3
N2 - As a first step in predicting the phase equilibria in TM-Al-Ga-N systems, where TM denotes a transition metal from the first three transition series, phase equilibria are calculated in the TM-Al-N systems, and the condensed phases in equilibrium with both Aln and N2 gas are discussed with respect to the position of the transition metal in the periodic table, temperature, and nitrogen pressure. Possible phases for use as stable electrical contacts to AlGaN are identified using these predictions, similar previous predictions for the TM-Ga-N systems and experimental findings.
AB - As a first step in predicting the phase equilibria in TM-Al-Ga-N systems, where TM denotes a transition metal from the first three transition series, phase equilibria are calculated in the TM-Al-N systems, and the condensed phases in equilibrium with both Aln and N2 gas are discussed with respect to the position of the transition metal in the periodic table, temperature, and nitrogen pressure. Possible phases for use as stable electrical contacts to AlGaN are identified using these predictions, similar previous predictions for the TM-Ga-N systems and experimental findings.
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U2 - 10.1007/s11664-001-0012-4
DO - 10.1007/s11664-001-0012-4
M3 - Article
AN - SCOPUS:0035274132
SN - 0361-5235
VL - 30
SP - 175
EP - 182
JO - Journal of Electronic Materials
JF - Journal of Electronic Materials
IS - 3
ER -