Abstract
Recently, there has been significant interest in use of (Ba,Sr)TiO3 (BST) thin films for tunable high frequency (RF and microwave) components. In this paper we discuss the electrical properties of BST thin films grown by metalorganic chemical vapor deposition (MOCVD) as a function of DC bias and frequency at low frequency (<10 MHz) and high frequency (45 MHz - 18 GHz). Films display low losses (0.002 - 0.006) between 45 and 200 MHz and high tunability (> 50%) over the entire frequency range, making them suitable for these microwave applications. The effect of titanium content, thickness and Pt roughness on dielectric losses and tunability are discussed. Implications for microwave devices are discussed as well. Finally, we report the fabrication of a BST thin film device using a 3-layer mask set to measure electrical properties at RF/microwave frequencies.
Original language | English (US) |
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Pages | 365-368 |
Number of pages | 4 |
State | Published - Dec 1 2000 |
Event | 12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, United States Duration: Jul 21 2000 → Aug 2 2000 |
Other
Other | 12th IEEE International Symposium on Applications of Ferroelectrics |
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Country/Territory | United States |
City | Honolulu, HI |
Period | 7/21/00 → 8/2/00 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering