Abstract
A combination of statistical thermodynamics and electron spin resonance (ESR) measurements of defects known as E′ centers is used to develop a physically based predictive model of oxide charging. If is found that this model is in excellent agreement with experimental data.
| Original language | English (US) |
|---|---|
| Title of host publication | International Integrated Reliability Workshop Final Report |
| Editors | Anon |
| Publisher | IEEE |
| Pages | 134-141 |
| Number of pages | 8 |
| State | Published - 1996 |
| Event | Proceedings of the 1996 International Integrated Reliability Workshop - Lake Tahoe, CA, USA Duration: Oct 20 1996 → Oct 23 1996 |
Other
| Other | Proceedings of the 1996 International Integrated Reliability Workshop |
|---|---|
| City | Lake Tahoe, CA, USA |
| Period | 10/20/96 → 10/23/96 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Industrial and Manufacturing Engineering