TY - GEN
T1 - Piezoelectric actuators with Cu inner electrode
AU - Takayama, Y.
AU - Donnelly, N. J.
AU - Randall, Clive A.
PY - 2008
Y1 - 2008
N2 - The piezoelectric material composition is PZT-SKN with a Li 2CO3 flux. This system has been developed successfully for air-fired actuators in PSU with Ag-Pd alloyed inner electrodes. We tried to control the lead activity by adding higher excess PbO in the formulation. Samples were all sintered at 900°C for 6 hours in PO2 = 5.38×10-12 atm. With 3.0, 4.0wt% PbO excess addition, we note that density, micro-structure and permittivity are similar and there is a high electro-mechanical performance for example, the high field piezoelectric d 33 was ∼480pm/V. However, there is some decrease in d 33 after the sintering in low PO2 and Rayleigh coefficients shows PO2 to slightly suppressing both the intrinsic and extrinsic contribution to piezoelectric properties. Multilayer actuators with copper inner electrode were successfully fabricated with the PZT-SKN after processing with techniques and materials that have low residual carbon.
AB - The piezoelectric material composition is PZT-SKN with a Li 2CO3 flux. This system has been developed successfully for air-fired actuators in PSU with Ag-Pd alloyed inner electrodes. We tried to control the lead activity by adding higher excess PbO in the formulation. Samples were all sintered at 900°C for 6 hours in PO2 = 5.38×10-12 atm. With 3.0, 4.0wt% PbO excess addition, we note that density, micro-structure and permittivity are similar and there is a high electro-mechanical performance for example, the high field piezoelectric d 33 was ∼480pm/V. However, there is some decrease in d 33 after the sintering in low PO2 and Rayleigh coefficients shows PO2 to slightly suppressing both the intrinsic and extrinsic contribution to piezoelectric properties. Multilayer actuators with copper inner electrode were successfully fabricated with the PZT-SKN after processing with techniques and materials that have low residual carbon.
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U2 - 10.1109/ISAF.2008.4693812
DO - 10.1109/ISAF.2008.4693812
M3 - Conference contribution
AN - SCOPUS:58149515788
SN - 1424427444
SN - 9781424427444
T3 - IEEE International Symposium on Applications of Ferroelectrics
BT - 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
T2 - 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
Y2 - 23 February 2008 through 28 February 2008
ER -