TY - JOUR
T1 - Piezoelectric and dielectric reliability of lead zirconate titanate thin films
AU - Polcawich, Ronald G.
AU - Trolier-McKinstry, Susan
N1 - Funding Information:
The authors would like to thank Paul Moses for technical assistance and Defense Advanced Research Projects Agency (DARPA) (contract DABT63-95-C-0053) and National Science Foundation (contract DMR-9502431) for financial assistance. In addition, the authors thank Dr. Clive Randall and Dr. William Warren for helpful technical discussions.
PY - 2000/11
Y1 - 2000/11
N2 - This work was directed toward developing a database for the long-term reliability of the transverse piezoelectric coefficient d31 under both unipolar and bipolar drive. Under unipolar drive, the films showed excellent reliability, with 99% of the devices surviving to 109 cycles. However, both aging and low amplitude bipolar drive resulted in rapid degradation of d31 due to backswitching of the ferroelectric domains. Both thermal and ultraviolet (UV) imprint prevented backswitching and resulted in improved aging and bipolar degradation behavior. Additionally, the UV imprinted samples showed nonlinear aging due to the presence of an internal space charge field that developed from photo-induced charge carriers.
AB - This work was directed toward developing a database for the long-term reliability of the transverse piezoelectric coefficient d31 under both unipolar and bipolar drive. Under unipolar drive, the films showed excellent reliability, with 99% of the devices surviving to 109 cycles. However, both aging and low amplitude bipolar drive resulted in rapid degradation of d31 due to backswitching of the ferroelectric domains. Both thermal and ultraviolet (UV) imprint prevented backswitching and resulted in improved aging and bipolar degradation behavior. Additionally, the UV imprinted samples showed nonlinear aging due to the presence of an internal space charge field that developed from photo-induced charge carriers.
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U2 - 10.1557/JMR.2000.0360
DO - 10.1557/JMR.2000.0360
M3 - Article
AN - SCOPUS:0034333879
SN - 0884-2914
VL - 15
SP - 2505
EP - 2513
JO - Journal of Materials Research
JF - Journal of Materials Research
IS - 11
ER -