TY - CONF
T1 - Piezoelectric films for mems applications
AU - Trolier-McKinstry, Susan
AU - Gharb, N. Bassiri
AU - Hong, E.
AU - Lacey, J.
AU - Nino, J.
AU - Xu, F.
AU - Wolf, R. A.
AU - Yoshimura, T.
AU - Zhang, Q.
AU - Zhou, Q.
N1 - Funding Information:
Financial support was given by Swedish Board for Technical Development (grants 90-01268, 90-00518), the Swedish Medical Research council (grant 9481), and Swedish Heart and Lung Foundation. Reprint requests: Bengt Wranne, MD, Department of Clinical Physiology, University Hospital, S-851-85 Linki:iping, Sweden. Copyright© 1993 by the American Society ofEchocardiography. 0894-7317/93 $1.00 + .10 27/l/42229
PY - 2005
Y1 - 2005
N2 - Ferroelectric thin films are attractive for miniaturized piezoelectric and pyroelectric devices due to the substantial property coefficients that are available. This paper descibes the factors that control the magnitude of the piezoelectric response that can be achieved in thin films. The importance of composition, orientation, domain wall mobility, clamping by the substrate, and transition temperature will be discussed. These factors will be illustrated with data on lead zirconate titanate(PZT), lead magnesium niobate - lead titanate, lead ytterbium niobate-lead titanate, and bismuth scandale - lead titanate. It has been found that with (001) oriented thin films on the rhombohedral side of the morphotropic phase boundary, it is often possible to achieve e 31,f coefficients larger than -10C/m 2, which is an order of magnitude larger than is available in ZnO or AlN films.
AB - Ferroelectric thin films are attractive for miniaturized piezoelectric and pyroelectric devices due to the substantial property coefficients that are available. This paper descibes the factors that control the magnitude of the piezoelectric response that can be achieved in thin films. The importance of composition, orientation, domain wall mobility, clamping by the substrate, and transition temperature will be discussed. These factors will be illustrated with data on lead zirconate titanate(PZT), lead magnesium niobate - lead titanate, lead ytterbium niobate-lead titanate, and bismuth scandale - lead titanate. It has been found that with (001) oriented thin films on the rhombohedral side of the morphotropic phase boundary, it is often possible to achieve e 31,f coefficients larger than -10C/m 2, which is an order of magnitude larger than is available in ZnO or AlN films.
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M3 - Paper
AN - SCOPUS:28544436225
SP - 190
EP - 195
T2 - Epitaxial Growth of Functional Oxides - Proceedings of the International Symposium
Y2 - 12 October 2003 through 17 October 2003
ER -