Skip to main navigation
Skip to search
Skip to main content
Penn State Home
Help & FAQ
Home
Researchers
Research output
Research units
Equipment
Grants & Projects
Prizes
Activities
Search by expertise, name or affiliation
Piezoelectric films for MEMS applications
S. Trolier-McKinstry
Materials Science and Engineering
Materials Research Institute (MRI)
Nanofabrication Laboratory
Research output
:
Contribution to journal
›
Article
›
peer-review
12
Scopus citations
Overview
Fingerprint
Fingerprint
Dive into the research topics of 'Piezoelectric films for MEMS applications'. Together they form a unique fingerprint.
Sort by
Weight
Alphabetically
Engineering & Materials Science
MEMS
95%
Ferroelectric films
47%
Ferroelectric thin films
45%
Hydrophones
35%
Accelerometers
24%
Thin films
24%
Polarization
23%
Ultrasonics
22%
Substrates
18%
Physics & Astronomy
microelectromechanical systems
100%
hydrophones
30%
accelerometers
30%
actuation
27%
thin films
26%
pumping
21%
flux density
20%
chips
20%
requirements
17%
sensitivity
15%
polarization
13%
Chemical Compounds
Liquid Film
49%
Ferroelectric Film
44%
Application
32%
Instrumentation
25%
Polarization
19%
Energy
12%