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Piezoelectric MEMS energy harvesters
Hong Goo Yeo
, Charles Yeager
, Xiaokun Ma
, J. Israel Ramirez
, Kaige G. Sun
,
Christopher Rahn
,
Thomas N. Jackson
,
Susan Trolier-McKinstry
Mechanical Engineering
Materials Research Institute (MRI)
Materials Science and Engineering
Nanofabrication Laboratory
Electrical Engineering
Research output
:
Chapter in Book/Report/Conference proceeding
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Conference contribution
1
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Scopus citations
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Keyphrases
Pb(Zr,Ti)O3
100%
Piezoelectric MEMS
100%
Resonant Frequency
75%
Proof Mass
75%
Si Substrate
50%
Ni Foil
50%
Cantilever
50%
Mechanical Energy
50%
Cantilever Beam
50%
High Power
25%
Room Temperature
25%
Beamwidth
25%
Energy Harvesting System
25%
Maximum Power
25%
RF Magnetron Sputtering
25%
Circuitry
25%
Order of Magnitude
25%
Dielectric Permittivity
25%
Solid State
25%
Wireless
25%
Analytical Model
25%
Modeling Data
25%
Annealing
25%
Microfabrication
25%
Chemical Solution Deposition
25%
Maximum Output Power
25%
Energy Harvesting
25%
Coefficient of Thermal Expansion
25%
Highly Reliable
25%
Power Level
25%
Beam Energy
25%
Average Power
25%
Mode Shape
25%
Fracture Strength
25%
Energy Harvester
25%
Self-development
25%
HfO2
25%
Piezoelectric Layer
25%
Metal Foil
25%
Self-powered
25%
Harvester
25%
ZnO Thin Film Transistor
25%
Passive Layer
25%
Out-of-plane Polarization
25%
Low Loss Tangent
25%
Solar Energy
25%
Euler-Bernoulli Beam
25%
Load Resistance
25%
Metallic Substrate
25%
Vibrating Structure
25%
LaNiO3
25%
Film Orientation
25%
Diode Rectification
25%
Large Vibrations
25%
Material Science
Piezoelectricity
100%
Microelectromechanical System
100%
Film
75%
Permittivity
50%
Thin Films
25%
Magnetron Sputtering
25%
Thermal Expansion
25%
Thin-Film Transistor
25%
Aluminum Nitride
25%
Solution (Chemistry)
25%
ZnO
25%
Fracture Toughness
25%
Microfabrication
25%
Engineering
Film Orientation
25%