Piezoelectric microgenerators - Current status and challenges

Hyun Uk Kim, Woo Ho Lee, H. V.Rasika Dias, Shashank Priya

Research output: Contribution to journalArticlepeer-review

61 Scopus citations


This manuscript reviews the developments made in design and fabrication of piezoelectric microgenera- tors and presents a method for making a comparative study within various vibration energy harvesting mechanisms. Current generation vibration energy harvesters have power density in the range of 0.8 μW/mm 3. The manuscript also reports our results on synthesis of barium titanate (BT) thin films for MEMS (micro-electromechanical systems) based energy harvester. BT sol-gel was synthesized by aqueous process using barium acetate and titanium bis (ammonium lacto) dihydrox- ide with PVP (Polyvinylpyrrolidone). After optimizing the annealing temperature and time, textured BT films with 600 nm thickness were obtained on (111) Pt/Ti/SiO 2 wafer. A MEMS fabrication process flow was designed to produce microcantile- ver chips from BT films constituting 6 cantilevers connected in series with an interdigital electrode pattern. We also present some concepts for further improvement of the power density of vibration energy harvesters by incorporating 3-D structure, magnetoelectric material, and a multimodal scheme.

Original languageEnglish (US)
Article number5183582
Pages (from-to)1555-1568
Number of pages14
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number8
StatePublished - Aug 2009

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering


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