Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films

Daisuke Saya; Denis Dezest; Aaron J. Welsh; Fabrice Mathieu; Olivier Thomas; Thierry Leïchlé; Susan Trolier-Mckinstry; Liviu Nicu

doi:10.1088/1361-6439/ab60bf

Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films

Daisuke Saya, Denis Dezest, Aaron J. Welsh, Fabrice Mathieu, Olivier Thomas, Thierry Leïchlé, Susan Trolier-Mckinstry, Liviu Nicu

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever resonators of various dimensions were fabricated to assess the variability in PZT properties as a function of the device dimensions; the microcontact-printed PZT was 281 nm thick. PZT layers of the cantilevers were poled at 107 kV cm^-1 and 150 °C to improve their piezoelectric properties. It was demonstrated that PZT piezoelectrics can be utilized for simultaneous actuation and detection of resonance. The PZT cantilevers were analytically modelled to estimate values of their piezoelectric coefficient d ₃₁.

Original language	English (US)
Article number	035004
Journal	Journal of Micromechanics and Microengineering
Volume	30
Issue number	3
DOIs	https://doi.org/10.1088/1361-6439/ab60bf
State	Published - 2020

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/1361-6439/ab60bf

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abstract = "A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever resonators of various dimensions were fabricated to assess the variability in PZT properties as a function of the device dimensions; the microcontact-printed PZT was 281 nm thick. PZT layers of the cantilevers were poled at 107 kV cm-1 and 150 °C to improve their piezoelectric properties. It was demonstrated that PZT piezoelectrics can be utilized for simultaneous actuation and detection of resonance. The PZT cantilevers were analytically modelled to estimate values of their piezoelectric coefficient d 31.",

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T1 - Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films

AU - Saya, Daisuke

AU - Dezest, Denis

AU - Welsh, Aaron J.

AU - Mathieu, Fabrice

AU - Thomas, Olivier

AU - Leïchlé, Thierry

AU - Trolier-Mckinstry, Susan

AU - Nicu, Liviu

PY - 2020

Y1 - 2020

N2 - A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever resonators of various dimensions were fabricated to assess the variability in PZT properties as a function of the device dimensions; the microcontact-printed PZT was 281 nm thick. PZT layers of the cantilevers were poled at 107 kV cm-1 and 150 °C to improve their piezoelectric properties. It was demonstrated that PZT piezoelectrics can be utilized for simultaneous actuation and detection of resonance. The PZT cantilevers were analytically modelled to estimate values of their piezoelectric coefficient d 31.

AB - A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever resonators of various dimensions were fabricated to assess the variability in PZT properties as a function of the device dimensions; the microcontact-printed PZT was 281 nm thick. PZT layers of the cantilevers were poled at 107 kV cm-1 and 150 °C to improve their piezoelectric properties. It was demonstrated that PZT piezoelectrics can be utilized for simultaneous actuation and detection of resonance. The PZT cantilevers were analytically modelled to estimate values of their piezoelectric coefficient d 31.

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Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films

Abstract

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