Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films

Keyphrases

• System Integration 100%
• Lead Zirconate Titanate Thin Films 100%
• Microcontact 100%
• Nanoelectromechanical Systems 100%
• Detection Efficiency 50%
• Piezoelectric Properties 50%
• Piezoelectric Coefficient 50%
• Actuation 50%
• Lead Zirconate Titanate 50%
• PZT Thin Films 50%
• Actuation Capability 50%
• Microcontact Printing 50%
• Cantilever 50%
• Device Dimensions 50%
• Estimate Value 50%
• PZT Cantilever 50%
• Cantilever Resonator 50%

Material Science

• Film 100%
• Piezoelectricity 100%
• Lead Zirconate Titanate 100%
• Thin Films 25%
• Piezoelectric Property 25%
• Resonator 25%